Tarbiat Modares University The Modares Journal of Electrical Engineering 2228-527X 10 2 2010 07 01 Adjustability of the Sensitivity to Ethanol Vapor in ZnO/SnO2 Double Layer Thin Film Gas Sensors امکان تنظیم حساسیت به بخار اتانل در حسگرهای گاز دو لایه‌ای ZnO/SnO2 73 81 12825 EN Mohammad Orvatinia Faculty of Applied Science of Post and Communications Reza Afzalzadeh K. N. Toosi Univ. of Tech. Faramarz Hossein Babaei K. N. Toosi Univ. of Tech. Journal Article Double layer ZnO/SnO2 thin film resistive gas sensors were fabricated by successive PVD of those oxides onto porcelain substrates. The metallic contacts were provided by electron beam evaporation of platinum onto substrates prior to deposition of the gas sensitive layers. Deposits were thermally annealed at different temperatures. It was shown that the activation energy of electrical conduction in the double layer depends on the annealing temperature. Higher annealing temperatures result in larger activation energies. The sensitivity of the double layer devices to ethanol vapor was measured and compared to that of single layer SnO2 sensors fabricated at similar conditions. It was shown for the first time that the gas sensitivity of ZnO/SnO2 thin film gas sensors can be adjusted by controlling parameters of the thermal annealing process. https://mjee.modares.ac.ir/article_12825_0e3e75d3095f3746ec2531e0bf543a5c.pdf