Analysis the Performance of Controllers for He-Ne Laser Stabilization by Combination of Frequency Locking and Power Balanced Methods for Nano-Metrology Applications

Bagheri, Mahsa; Olyaee, Saeed; Leitgeb, Erich

Analysis the Performance of Controllers for He-Ne Laser Stabilization by Combination of Frequency Locking and Power Balanced Methods for Nano-Metrology Applications

Authors

Mahsa Bagheri ¹

Saeed Olyaee ²

Erich Leitgeb ³

¹ MSc Student, Faculty of Electrical Engineering, Shahid Rajaee Teacher Training University, Tehran, Iran, nbm.

² Associate Professor, Nano-photonics and Optoelectronics Research Laboratory (NORLab), Shahid Rajaee Teacher Training University, Tehran, Iran,.

³ Professor, Graz University of Technology, Institute of Microwave and Photonic Engineering, Graz, Austria,

Abstract

In this paper, analysis the performance of PI, PI-like fuzzy, and parallel fuzzy P+ fuzzy I controllers for He-Ne lasers frequency stabilization by combination of frequency locking and power balanced methods is presented. He-Ne lasers can be attributed to an unstable system due to the influence of environmental factors on its' frequency. Therefore, the stabilization of He-Ne laser is so important in sensitive applications such as laser interferometers and nanometrology systems. The simulation results of controllers by powerful software MATLAB/SIMULINK-GUI show that parallel fuzzy P+ fuzzy I controller has better stabilization performance and integrated absolute error (IAE) than others. Also, frequency fluctuations of He-Ne laser is about 2×10^-11 by parallel fuzzy P+ fuzzy I controller.

Keywords

Cavity Length

Controller

He-Ne Lasers

Nanometrology

Thermal Instability